Advanced Single Wafer Processor

For higher throughput and clustered processing, the MultiCap Single Wafer Wet Processing System is featuring multiple process modules arranged either in horizontal or vertical configuration.

Several process modules for cleaning and processing with aqueous or solvent media can be clustered together in multiple process modules.

• Open spin process modules

• Closed spin process modules
  

• Single substrate immersion tanks
  

• Spin drying modules
  

• VUV / Ozone modules
  

• Megasonic modules
  

Advanced Metal Lift-off Processor

For application requiring clean, residue-free and damage-free device structures, features

• Solvent Immersion Station
  

• Solvent Spray Station
  

• Rinse / Spin Dry Station

• Solvent Recirculation Systems

MultiCap Product Information

Advanced Single Wafer Processor	Clean
	Etch
	Strip
Advanced Metal Lift-off Processor	Lift-off

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