The VertiClean Advanced Photomask Processor is a modular wet bench for single substrate processing, i.e. photomasks of sizes 6" x 6" or larger, guaranteeing ultimate process results.

The modular system architecture with immersion tanks, made of quartz or PVDF, and a flexible process flow with random access to the individual process tanks can be customized for all wet processes.

Applications

• Quartz etching with HF

• SPM and SOM cleaning

• SC1 and SC2 cleaning

• Megasonic cleaning

• IPA/N2 drying

• VUV/ozone cleaning

• Custom applications

VertiClean Product Information

Immersion Tanks	Customized, made of quartz / PVDF f. single substrate processing
Overflow Tanks	For continuous process media flow & subsequent DI-water rinsing
Diffuser Pipes	For homogeneous distrib. of process media across the substrate
Optimized process	SPM, SOM, SC1, SC2, HF
Megasonic	High efficient megasonic transducer with non-directive irradiation
Handling	State-of-the-art XLSI chemicals handling, ultra-pure components.
Hoses	All hoses and fittings made of PFA (Flair or Pillar)
Media Preparation	In-situ mixture of chemicals
Temp. Control	Exact temperature control of process media
Progr. Rates	Progr. concentration, flow rates and temperature of process media
Process Flow	Flexible, with random access to the individual process stations
Expandability	Integration of future cleaning techniques possible
Chemical supply	Chemical supply and distribution system with ozone generation
Waste collection	Waste collection system with separation of various chemicals
Tool Controller	Programmable

>>Technology

The VertiClean Quartz Etcher features a process tank made of PVDF with a unique pressurized diffuser plate overflow system resulting in uniform etch media flow onto the substrate surface, guaranteeing superior process results. All standard cleaning and etching processes as well as new to be developed cleaning techniques are possible

The remote chemical supply cabinet is made of fire retardant PVC-C Corzan material with a stainless steel basement and contains separate compartments for the different chemicals