The CapSpin system is a tool for spin processing of glass plates and photomasks with dimensions of up to 9" x 9" and higher. It offers robotic or manual handling, configured to customers applications.

Cleaner Applications

• SPM Cleaning
  
• SC-1 Cleaning
  
• Brush Cleaning
  
• High Pressure Cleaning
  
• Megasonic Cleaning

Processor Applications

• Photoresist Develop
  
• Chrome Metal Etch
  
• Resist Strip with spray nozzles
  
• DI-Water Rinse
  
• Spin Dry

CapSpin Product Information

Process Chamber	Large open, symmetrical exhaust and uniform airflow
Process Area	Extended diameter for optimum process environment
Chuck	Vertical movement for loading and unloading of the masks
Process Levels	Different process levels avoiding cross contamination
Nozzles	Stationary, nozzles mounted on motor driven dispense arm
Distance to Mask	Nozzles mounted on motor driven dispense arm
Temperature Control	Precise control of process media
Process Control	Advanced process control

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